Category
Gas Product
Toxic Gas
NH3, BCL3, BF3, CL2, CLF3, F2, GeF4, HBr, HF, 20% F2/N2, NO, WF6, NF3, PF3
Toxic / Flammable Gas
AsH3/Mix, CO, COS, DCS, GeH4/Mix, C4F6, PH3, C2H2, D2, DFM, Si2H6, CH3F, H2, C3H6, SiH4, TMS
Inert Gas
CF4, C4F8, SF6, CHF3, C2F6, Rare Gases, Laser Gases O2/He Mix, He/N2 Mix, CO2
Liquids
HCDS, C5F8, SiCL4, TiCL4